IIRC from the Veritasium video[0] there is actually some hydrogen gas flowing at quite a high speed though the laser chamber to carry away the tin debris so that it does not accumulate on the mirrors.
replyThey account to every single tiny atom somehow too, but I think I fell asleep last time I watched the video.
replyThe old SemiAccurate article https://semiaccurate.com/2013/02/13/euv-moves-forward-two-st... was very funny.
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