Department of ENERGY not the DoD.

The EUV IP which Cymer owns was originally part of EUV LLC, which was an LLNL [0], Sandia [1], and Intel [2] initiative as part of a CRADA. Cymer eventually began working on EUV as well building on EUV LLC and SEMATECH's work, and was eventually purchased by ASML after the Dept of Commerce and DoE backed their acquisition in 2013 [4], but included Cymer in additional CRADAs [3], ongoing projects [5], and maintain Cymer as a separate operating unit [6] within ASML.

It is these CRADAs that allow the DoE to exert its muscle on IP ownership and knowhow, as they are essentially a license of IP and personnel on US DoE terms [7] while also allowing for private partners to commercialize.

[0] - https://www.llnl.gov/article/27641/euvl-partnership-makes-it...

[1] - https://newsreleases.sandia.gov/partners-unveil-first-extrem...

[2] - https://www.intel.com/pressroom/archive/speeches/EUV91197.HT...

[3] - https://www.osti.gov/biblio/1413999

[4] - https://www.asml.com/en/news/press-releases/2013/asml-comple...

[5] - https://www.llnl.gov/article/52226/llnl-selected-lead-next-g...

[6] - https://bidenwhitehouse.archives.gov/wp-content/uploads/2021...

[7] - https://www.directives.doe.gov/directives-documents/400-seri...

The US used this agreement to bar ASML from selling the machines to China in 2018.

The machine is a clump of metal without the light source.

The metrology is coming from Taiwan and California (HMI) as well. The Veldhoven campus "only" does final assembly (which should not be underestimated either - it's complex and high precision work).

But it's the light source and the metrology that is the blocker.

Edit: can't reply

> And mirrors from Carl Zeiss

Absolutely! But note how Zeiss/Trumpf is not ASML. If the US DoE changes the terms of the Cymer partnership and pressures Taiwan (who have just purchased $8B in US military equipment and whom the EU logistically speaking cannot protect) to revert the HMI acquisition, ASML is over.

Additonally, a lot of the muscle around Zeiss/Trumpf's mirrors is also at the Zeiss office in the Tri-Valley because of their partnership with LLNL.

And both China [0] and Japan [1] are in the process of building an Ex-ASML supply chain for EUV, NA EUV, and DUV, and will likely reach that point by the late 2020s to early 2030s.

[0] - https://www.reuters.com/world/china/how-china-built-its-manh...

[1] - https://www.nikkei.com/nkd/company/us/SNPS/news/?DisplayType...