Huygens Optics:
https://www.youtube.com/watch?v=_w0Z2Y5vaAQ
Sam Zeloof:
https://www.youtube.com/watch?v=Nxz_ENnmgtI
In general, getting vanity silicon made is usually much less expensive than trying to bootstrap a fab line. =3
I meant "drawing" on a photoresist layer with a SEM and then wet-etching it. Also all silicon in a photodiode is doped, so the etched parts would be of little use, I believe.
Definitely hard for a home fab but how about a community fab? Not necessarily a geographic community.