- ASML's High-NA EUV machines ready for high-volume production
- Machines have processed 500,000 wafers, showing technical readiness
- Full integration into manufacturing expected in 2-3 years, ASML's CTO says
After that, it may be X-rays.
A disruptive step would be to move to 3D printing, but that (among other issues) is too slow at the moment. Maybe, ideas from nano robotics (https://en.wikipedia.org/wiki/Nanorobotics) can help there.
The lithography equivalents of that are laser direct write lithography and e-beam lithography. They've been used for decades in research labs, but they're impossibly slow for any mass production.
Atomic Semi are trying to make some derivative of these processes happen at a commercial scale.
Well, even jet engine manufacturing is something that China is behind in (relatively speaking), and it (seems?) is simpler than some of the stuff in EUV machines.
I can understand why you can't just take one apart and copy it.
There's (apparently) 4 decades of accumulated cutting edge scientific research that has gone into these machines.
I suspect the machinery, process and human expertise required to simply produce the parts required for these machines is the real moat (oh and I guess the US-led export controls too).
The build tolerances for components are incredible. There are 11 primary mirrors in an EUV machine, each one has something like 100 coats of ultra-pure materials that are precisely deposited in picometer-thick layers with tolerances in the nanometers, across a 1-meter wide curved surface.
Then you have to position the mirrors perfectly inside the machine, again with tolerances in the nanometers.
So even if you know what you need to do, having the equipment and expertise to do it is a different thing.
And that's just one part of the 100,000+ parts that make up an EUV machine.
But in this case the Chinese will just develop their own alternative, that might work as good or even better
"With all the problems we have getting this to work? We ought to ship our drawings to our competitors to slow them down!"
Very tongue-in-cheek, but... yeah. The entire machine underwent a massive overhaul when it was discovered that bare, unoxidized titanium in the presence of elemental hydrogen would absorb so much it became brittle. Who knew? Maybe some few chemists, but none worked in ASML design, as it happened.