The idea of a computer virus in the film "Westworld" was, to me at the time, something out of left field. (And speaking of Michael Crichton, "The Andromeda Strain" was "intelligent" sci-fi and we enjoyed it.)
"Mad Max", though it came after "Star Wars", drew inspiration from "A Boy and His Dog", "Deathrace 2000"…
A Golden Age for sure.
One show that wasn’t exactly science fiction but was really good was the Prisoner with Patrick McGowan.
They are still very good anthology Science Fiction being written, but unfortunately Hollywood today isn’t doing that many – adaptations as usual Hollywood doesn’t like hire writers outside Hollywood.
As does https://en.wikipedia.org/wiki/The_Thirteenth_Floor which is sort of a remake of World on a Wire(coming from Simulacron III).
I miss the days when SciFi didn't mean an action film in a future setting that just ends up being the good guy(s) being chased by the bad guy(s).
Edit: Apparently I had heard of World on a Wire, but forgot about it as I've already got a copy as a series rather than a film.