They are already doing 5nm with multi-patterning DUV. But that's not the same as EUV machines. It is not nearly the same scale of production (with yields as low as 20%). They are still a few years away from indigenous EUV. Though I have to admit the shenzhen breakthrough was pretty impressive
replyIs DUV inherently 5nm a 20% yield class or it's matter of process improvement that China is struggling compared to taiwan or Intel ?
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